ceaser 1310射频电源设置
本文由ceaser 1310射频电源维修部门提供，更多的ceaser 1310射频电源原理图，bom,机械结构等资料联系AE 身频电频电源售后13790663326.
调节模式设置允许您在三种RF功率调节模式设置中进行选择以控制发生器: • 正向功率调节 (Pforward) 在正向功率调节中，CESAR发生器以恒定的正向功率调节RF功率。• 负载功率调节
在负载功率调节中，CESAR发生器以恒定负载 (实际) 功率调节RF功率。• 外部功率调节 (DC偏置) 在外部功率调节中，CESAR发生器在腔室中以恒定的DC自偏置电压调节RF功率。RF输出功率可以被限制以保护
使用 CESAR 发生器前面板选择调节模式：
1. 按程序软键。
2. 按“下一步”，直到您在显示屏上看到“控制设置”。
3. 按更改。
4. 按所需调节模式的软键：Control Pforward、
控制普雷亚尔
，或控制直流偏置。
5. 对于 Pforward 或 Preal
调节模式，设置所需的功率设定点
结合使用 Increm Auto 键和
RF POWER 旋钮。
6. 对于 DC Bias 控制，使用以下组合设置 DC Bias 值：
Increm Auto 键和 RF POWER 旋钮。
4该值可以在 0 V 到 4000 V 之间
注：4000 V 为默认值。 要更改默认设置，请参阅
“使用以下命令更改默认设备配置设置
CESAR 发生器前面板：”第 5-41 页
7. 按确定确认。
8. 对于 DC Bias 控制，将 Pforward 最大值设置在 60 W 和 1 之间
kW 使用 Increm Auto 和 RF POWER 旋钮的组合
旋钮。
9. 按确定确认。
10. 按退出。
11. 按执行。
操作屏幕将更改以显示新的控制设置并
价值观。
比赛设置
如果您的射频功率传输系统包括
五、AE射频电源售后联系方式
AE射频电源售后电话13790663326
AE射频电源维修公司：东莞全芯工控科技有限公司
六、CESAR 2720射频电源维修手册，射频电源维修说明书
七、AE射频电源型号大全
品牌 | 型号 | 产品号 | 类型 |
AE | Integro 136 | 65000004 | Generator |
AE | RFX II 3000 | 3155047-000 D | Generator |
AE | Navigator | 3155162-002C | Match |
AE | Verteq | 3156023-000 C | Generator |
AE | ION Source Supply | 1101001 D | Generator |
AE | AZX Box Module | 3155037-000 C | Match |
AE | Pinnacle 6k | 3152338-019 A | Generator |
AE | RFX II 3000 | 3155047-001 D | Generator |
AE | RF-5S | 3150004-020 | Generator |
AE | ATX 600 | 3155017-014 F | Match |
AE | Pinnacle Controller | 3152388-003 A | Miscellaneous |
AE | RFX 600 | 3155002-032 C | Generator |
AE | Verteq | 3156023-000 C | Generator |
AE | RFX II 3000 | 3155047-000 D | Generator |
AE | MDX-10K Master | 2194-013 W | Generator |
AE | Ovation 35162 | 3150861-002 D | Generator |
AE | RFX 600A | 3155082-212 A | Generator |
AE | Controller | 3150301-000 | Miscellaneous |
AE | Pinnacle 15k | 3152353-120 B | Generator |
AE | RFG 3000 | 3155038-004 B | Generator |
AE | VM 1000 A | 69000114 | Match |
AE | MDX 1.5 | 3152240-007 C | Generator |
AE | PDX 2500 | 3156012-201 D | Generator |
AE | Pinnacle 6k | 3152429-129 K | Generator |
AE | Paramount 3013 | 3156330-000 A | Generator |
AE | PE-2500 | 3157504-012 | Generator |
AE | RFX 600A | 3155082-000 J | Generator |
AE | Pinnacle Plus 10k | 3152436-359 L | Generator |
AE | MDX-L Diagnostic Controller | 3152292-000 B | Miscellaneous |
AE | ATX 600 | 3155017-014 F | Match |
AE | Sparc-le V | 3152330-203 E | Generator |
AE | Pinnacle 10K | 3152414-145 E | Generator |
AE | AM-20 | 3150171-000 | Match |
AE | Analog Control Fixture | 3155061-001 A | Miscellaneous |
AE | Apex 5513 | 3156116-203 A | Generator |
AE | PDX 2500 | 3156012-201 B | Generator |
AE | Pinnacle 6k | 3152411-219 A | Generator |
AE | ATN Match | 5026-001 B | Match |
AE | HFV 8000 | 3155083-150 A | Generator |
AE | LF-5 | 3150011-000 | Generator |
AE | MDX II Calibration Box | 2285 000 A | Miscellaneous |
AE | Dome Match | 3155086-604 | Match |
AE | AZX 10 Controller | 3155050-000 | Miscellaneous |
AE | Hilight 133 | 61300025 | Generator |
AE | RFX 600A | 3155082-002 H | Generator |
AE | Pinnacle 10K | 3152414-145 E | Generator |
AE | Apex 1513 | 3156111-003 D | Generator |
AE | Apex 3013 | 3156113-007 | Generator |
AE | RFX 600 | 3155002-032 C | Generator |
AE | PMH13/3000 | 3152290-000 C | Miscellaneous |
AE | PDW 2200 | 3156011-002 A | Generator |
AE | Mercury 10013 | 3150273-004 | Match |
AE | RFX 600 | 3155002-032 D | Generator |
AE | Cesar 1310 | 61300050 | Generator |
AE | Hilight 133 | 61300025 | Generator |
AE | Pinnacle Controller | 3152327-000 B | Miscellaneous |
AE | RFX II 1250 | 3155035-000 N | Generator |
AE | ATX 600 | 3155017-000 L | Match |
AE | Counter/Display | 3152328-000 B | Match |
AE | Pinnacle 20k | 3152391-205 A | Generator |
AE | MDX Master | 2194-013 W | Generator |
AE | MDX Slave | 2169-005-01 | Generator |
AE | AZX 10 | 3155036-000 E | Match |
AE | RFX 600 | 3155002-032 B | Generator |
AE | Ovation 35162 | 3150861-002 D | Generator |
AE | Sparc-le V | 3152330-003 B | Generator |
AE | Mercury 10013 | 3150273-005 A | Match |
AE | Analog Control Fixture | 3155061-001 A | Miscellaneous |
AE | RFX 600 | 3155002-032 | Generator |
AE | Power Sensor | 2290-000C | Miscellaneous |
AE | Apex 1513 | A3L5L000BA140D111A | Generator |
AE | Pinnacle 10k | 3152414-145 C | Generator |
AE | RF-5S | 3150853-000 | Generator |
AE | Z Scan | Miscellaneous | |
AE | AZX Controller | 3155050-003 A | Miscellaneous |
AE | MDX Controller | 3152334-000 B | Miscellaneous |
AE | PDX 2500 | 3156012-201 D | Generator |
AE | VHF2060 | Generator | |
AE | Pinnacle 20k | 3152391-205 A | Generator |
AE | Cesar 2710 | 61400022 | Generator |
AE | AZX 63 Controller HTCM | 1345193 D | Miscellaneous |
AE | Pinnacle Controller | 3152327-000 B | Miscellaneous |
AE | PMH 400/2200 | 3152291-000 | Miscellaneous |
AE | PMH13/3000 | 3152290-000 C | Miscellaneous |
AE | Cesar | 61300057 | Generator |
AE | Analog Control Fixture | 3155061-001 A | Miscellaneous |
AE | Cesar 1312 | 61300057 | Generator |
AE | PE-1000 | PE 1000 | Generator |
AE | LF-5 | 3150011-002 | Generator |
AE | RFX II 3000 | 3155047-000 D | Generator |
AE | RFX 600A | 3155082-231 A | Generator |
AE | Gencal Power Meter | 3152288-000 E | Miscellaneous |
AE | Pinnacle 10K | 3152414-145 E | Generator |
AE | LF-5 | 3150012-000 R | Generator |
AE | Pinnacle Controller | 3152327-000 | Miscellaneous |
AE | Apex 1513 | A3B2A000BA150D011A | Generator |
AE | PDW Controller | 6029-000-A | Miscellaneous |
AE | LF-5 | 3150011-000 | Generator |
AE | Mercury 10013 | 3150273-004 | Match |
AE | MDX 1.5K | 2164-000-A | Generator |
AE | Pinnacle 10k | 3152414-122 L | Generator |
AE | RFX 600A | 3155082-220 | Generator |
AE | Fixed Match | EX1 / FP2241R1 | Match |
AE | HFV 8000 | 3155083-192 A | Generator |
AE | Pinnacle 20k | 3152391-205 A | Generator |
AE | Hilight 133 | 61300025 | Generator |
AE | RFX II 3000 | 3155047-000 D | Generator |
AE | ATX 600 | 3155017-014 F | Match |
AE | PDX II PLASMA DRIVE 2000 | 3150310-100 A | Generator |
AE | Apex 3013 | 3156113-007 | Generator |
AE | MDX 1.5K | 3152164-009 E | Generator |
AE | MDX-L Diagnostic Controller | 3152292-000 B | Miscellaneous |
AE | HFV 8000 | 3155083-150 A | Generator |
AE | VHF2060 | 3150852-004 | Generator |
AE | Ovation 2060 | 3150852-005 | Generator |
AE | Aspect 5013 | Generator | |
AE | AZX Controller | 3155050-000 C | Miscellaneous |
AE | RFG 3000 | 3155038-004 D | Generator |
AE | RFX 600 | 5002-021 C | Generator |
AE | RFX 600A | 3155082-331 D | Generator |
AE | Cesar 136 | 61300048 | Generator |
AE | PDW Controller | 6029-000-A | Miscellaneous |
AE | Dome Match | 3155086-604 | Match |
AE | RFX 600A | 3155082-212 A | Generator |
AE | PE-2500 | 3157504-012 | Generator |
AE | RFX 600 | 3155002-032 D | Generator |
AE | MDX-5K | 2011-029 G | Generator |
AE | PMH 400/2200 | 3152291-000 | Miscellaneous |
AE | Pinnacle 20k | 3152391-205 A | Generator |
AE | Analog Control Fixture | 3155061-001 A | Miscellaneous |
AE | Pinnacle Plus 10k | 3152436-359 E | Generator |
AE | PMH13/3000 | 3152290-000 C | Miscellaneous |
AE | RF-20 | 3150073-000 | Generator |
AE | Apex 1513 | 3156111-004 C | Generator |
AE | RFX 600 | 3155002-032 D | Generator |
AE | PMH 400/2200 | 3152291-000 | Miscellaneous |
AE | Dome Match | 3155086-102 | Match |
AE | HFV 8000 | 3155083-180 A | Generator |
AE | Mercury d2 | 3150272-006 | Match |
AE | RFX II 3000 | 3155047-000 B | Generator |
AE | ATX 600 Controller | 3155022-000 E | Miscellaneous |
AE | Pinnacle 10K | 3152414-222 A | Generator |
AE | Pinnacle 10k | 3152414-122 M | Generator |
AE | RFX II 3000 | 3155047-005 C | Generator |
AE | Hilight 133 | 61300025 | Generator |
AE | PE-2500 | 3157504-012 F | Generator |
AE | Dome Match | 3155086-102 | Match |
AE | GenCal Power Sensor | 3152289-000 C | Miscellaneous |
AE | AZX 10 | 3155036-000 E | Match |
AE | Pinnacle 10K | 3152414-222 A | Generator |
AE | AZX Controller | 3155050-000 | Miscellaneous |
AE | RFX 600 | 3155002-032 D | Generator |
AE | PDX 2500 | 3156012-201 D | Generator |
AE | ATX 600 Controller | 3155021-000 B | Miscellaneous |
AE | Navigator 10013-L80 | 3155162-002 E | Match |
AE | Cesar 2720 | 61400034 | Generator |
AE | Gencal Power Meter | 3152288-000 D | Miscellaneous |
AE | VHF2060 | Generator | |
AE | PDX 2500 | 3156012-201 C | Generator |
AE | MDX Magnetron | 3152011-011 C | Generator |
AE | Aspect 2513 | Aspect 2513 | Generator |
AE | MDX-5K | 3152011-029 Y | Generator |
AE | RF-5S | 7510313017 | Generator |
AE | Pinnacle Plus 5k | 3152437-355 A | Generator |
AE | Pinnacle 20k | 3152391-205 A | Generator |
AE | Cesar 2720 | 61400034 | Generator |
AE | LF-5 | 3150012-000 | Generator |
AE | Pinnacle Dual 6k | 3152427-114 A | Generator |
AE | Ovation 35162 | 3150861-002 D | Generator |
AE | RFX 600 | 3155002-032 B | Generator |
AE | AMNPS-2A Controller | 3150302-000 A | Miscellaneous |
AE | MDX 10K | Generator | |
AE | Mini-Panel | 31522327-100 A | Miscellaneous |
AE | AZX Controller | 3155039-001 A | Miscellaneous |
AE | HFG 5000 | 3155095-001 A | Generator |
AE | Cesar 2720 | 61400034 | Generator |
AE | Hilight 136 | 61300027L | Generator |
AE | PDW Controller | 6029-000-B | Miscellaneous |
AE | RF-30P | 3150281-000 | Generator |
AE | Pinnacle 10K | 3152414-222 A | Generator |
AE | MDX Magnetron Drive | 3152194-016 W | Generator |
AE | RF-5S | 3150004-012 G | Generator |
AE | Navigator Match | 3155162-002 F | Match |
AE | Pinnacle 15k | 3152353-120 B | Generator |
AE | Gencal Power Meter | 3152288-000 E | Miscellaneous |
AE | PDW 600 | 3156014-000 B | Generator |
AE | PDX 2500 | 3156012-201 B | Generator |
AE | Pinnacle 20k | 3152391-205 A | Generator |
AE | Pinnacle Controller | 3152327-000 B | Miscellaneous |
AE | Cesar 136 | 61300048 | Generator |
AE | AZX 63 Controller HTCM | 1345193 D | Miscellaneous |
AE | PMH 400/2200 | 3152291-000 | Miscellaneous |
AE | Hilight 136 | Generator | |
AE | RFX 600A | 3155082-331 D | Generator |
AE | MDX-L Diagnostic Controller | 3152292-000 B | Miscellaneous |
AE | RFX 600 | 5002-000 K | Generator |
AE | RFX 600A | 3155082-331 D | Generator |
AE | Sparc-le 20 | 3152244-000B | Power Supply |
AE | AZX 10 | 3155036-006 A | Match |
AE | Gencal Power Meter | 3152288-001 B | Miscellaneous |
AE | PDX 2500 | 3156012-201 C | Generator |
AE | MDX-5K | 2011-029 C | Generator |
AE | AMNPS-2A Controller | 3150302-000 A | Miscellaneous |
AE | Fixed Match | WATER COOLED 3155077-001A | Match |
AE | RFG 3000 | Generator | |
AE | Cesar 1312 | 61300057 | Generator |
AE | RF-30S | 3150077-000 | Generator |
AE | Dome Match | 3155086-102 | Match |
AE | RFG 3000 | Generator | |
AE | RFX II Controller | 3155043-001A | Miscellaneous |
AE | GenCal Power Sensor | 3152288-000 E | Miscellaneous |
AE | Gencal Power Meter | 3152288-000 E | Miscellaneous |
AE | Pinnacle Plus 10k | 3152436-359 N | Generator |
AE | RFX II 1250 | 5035-000 K | Generator |
AE | Pinnacle Plus 10k | 3152436-359 J | Generator |
AE | MDX DELTA SLAVE | 3152194-008 Y | Generator |
AE | Mini-Panel | 31522327-100 A | Miscellaneous |
AE | RFX 600 | 3155002-032 B | Generator |
AE | Pinnacle 10k | 3152414-122 Q | Generator |
AE | RF-30S | 3150017-028 | Generator |
AE | TCM Controller | 3155039-002 A | Miscellaneous |
AE | LF-5 | 3150011-000 | Generator |
AE | Sparc-le-V | 3152330-203 E | Generator |
AE | RFX 600 | 3155002-032 B | Generator |
AE | PDX 2500 | 3156012-201 C | Generator |
AE | GenCal Power Sensor | 3152288-000 E | Miscellaneous |
AE | PMH 13/1250 | 3152289-000 C | Miscellaneous |
AE | RFX 600A | 3155082-331 D | Generator |
AE | Mercury 10013 | 3150273-004 B | Match |
AE | Pinnacle 10K | 3152414-145 E | Generator |
AE | PDX 2500 | 3156012-201 C | Generator |
AE | RFX 600A | 3155082-200 F | Generator |
AE | Apex 1513 | A3B0A000BA150D011A | Generator |
AE | RFX 600 | 3155002-000 D | Generator |
AE | Verteq | 3156023-000 C | Generator |
AE | Pinnacle 10k | 3152414-122 J | Generator |
AE | HFV 8000 | 3155083-192 A | Generator |
AE | Aspect 2513 | Aspect 2513 | Generator |
AE | Pinnacle 6k | 3152338-001 B | Generator |
AE | Navigator Match | 3155162-037 B | Match |
AE | Ovation 2760 | 3150292-007 F | Generator |
AE | PDW 600 | 6014-000 B | Generator |
AE | PEII 5K | 3157601-100 G | Generator |