Daihen射频电源频率模式操作方法
Daihen射频电源频率模式操作方法，简单有效，本文由daihen射频电源售后维修东莞全芯，根据多年射频电源维修经验整理而成，daihen射频电源维修电话13790663326，包修好包测试好，
下面介绍使用[并行I/0连接器]进行的频率控制操作。
(1)在开始此操作之前，确认射频电源已经关闭。通过前面板将频率控制模式更改为自动模式("Auto")或手动模式("Manu")。
(2)通过前面板或关闭[并联1/0连接器]的引脚8和21之间的连接，将控制模式更改为“并联I/0模式”。
频率控制模式可以通过【并行I/0连接器】的引脚#1和#14进行选择。通过关闭引脚#1和#14之间的(3)连接，将选择自动频率调谐。通过打开引脚#1和#14间的连接，将选择手动频率控制。
(4)在手动频率控制模式下，可以通过在引脚#6和#19(引脚#19为公共引脚)之间施加直流电压来控制输出频率。0Vdc到10Vdc将对应于12.88MHz到14.24MHz的输出。
(5)在输送RF功率时，可以操作频率控制模式改变(在(3)中描述)和手动频率控制在(4)中描述)
三、本通讯设置适用于的daihen射频电源型号
633 | Daihen / Rf Generator / Drfs-5Sa21 60Days Warranty |
634 | Daihen / Rf Generator / Drfs-5Sa21 60Days Warranty |
635 | DAIHEN / RMN-50N6, 0190-17029 / RF Generator, 5kW, Spellman, Not Relay |
636 | DAIHEN / RMN-50N6, 0190-17029 / RF Generator, 5kW, Spellman,ESC5PN25X3208 |
637 | DAIHEN 2L39-000009-21 / DAIHEN RTGA-30A1 RF GENERATOR / TOKYO ELECTRON TEL |
638 | DAIHEN 2L39-000066-31 / DAIHEN RTGA-30B RF GENERATOR / TOKYO ELECTRON TEL |
639 | Daihen 2L39-000099-32 FGA-30G1 RF Generator,40.68mHz,3000W,Used,JP^7271 |
640 | Daihen AGA-15A-V RF Generator TEL 2L39-000163-V2 |
641 | Daihen AGA-15A-V RF Generator TEL 2L39-000163-V2 |
642 | Daihen AGA-27C RF Generator TEL Tokyo Electron 3D80-000825-11 Copper Cu Working |
643 | Daihen AGA-27C-V RF Generator TEL 3D80-000825-V3 Copper Cu Exposed Working Spare |
644 | Daihen AGA-27C-V RF Generator TEL Tokyo Electron 3D80-000825-V3 Working Spare |
645 | Daihen AGA-27C-V RF Generator TEL Tokyo Electron 3D80-000825-V4 |
646 | Daihen AGA-27C-V RF Generator TEL Tokyo Electron 3D80-000825-V5 |
647 | DAIHEN AGA-50B2, DGP-120A2,3D80-000601-11 60MHz 5KW RF GENERATOR WORKING |
648 | DAIHEN AGA-50B2, DGP-120A2,3D80-000601-12 60MHz 5KW RF GENERATOR WORKING |
649 | DAIHEN AGA-50B2-V DGP-120A2-V RF GENERATOR STACK (TELPALLET) |
650 | DAIHEN AGA-50B2-V RF GENERATOR DGP-120A2-V 50/60HZ 200V 55A 60MHZ |
651 | Daihen AGA-50B2-V RF Generator DGP-120A2-V TEL 3D80-001479-V1 |
652 | Daihen AGA-50B2-V RF Generator DGP-120A2-V TEL 3D80-001479-V1 Bent Panel Tested |
653 | Daihen AGA-50B2-V RF Generator DGP-120A2-V TEL 3D80-001479-V1 DC Fault |
654 | Daihen AGA-50B2-V RF Generator DGP-120A2-V TEL 3D80-001479-V2 |
655 | Daihen AGA-50B2-V RF Generator DGP-120A2-V TEL 3D80-001479-V2 Untested Spare |
656 | Daihen AMAT FGA-50B 40.68MHz 5000W Water Cooled RF Generator w/DMU-01G Control |
657 | Daihen AMAT RGA-50J3 Avancer Water Cooled RF Generator w/DMU-01G Controller |
658 | Daihen Corp. 60MHz RF Generator AGA-15A-V 1500W 60MHz 200VAC 12A 3Ph |
659 | DAIHEN CORPORATION CH C. MICROWAVE RF GENERATOR ATP-15A1 |
660 | DAIHEN CORPORATION HFA-30A-V MATCH 3D80-000158-V3 RF GENERATOR |
661 | DAIHEN CORPORATION MICROWAVE RF GENERATOR ATP-10A1 |
662 | DAIHEN CORPORATION MICROWAVE RF GENERATOR ATP-10A1 |
663 | DAIHEN FGA-30A RF Generator 40.68MHZ 3200W 2L39-000006-13 |
664 | Daihen FGA-30A2 RF Generator |
665 | DAIHEN FGA-30A2 WATER COOLED RF GENERATOR 2L39-000006-21 DEVICENET 3200A 27A |
666 | DAIHEN FGA-30C RF GENERATOR NX-FGA-30C 3.2KW 40.68MHz |
667 | DAIHEN FGA-30C RF GENERATOR NX-FGA-30C 3.2KW 40.68MHz COVER DAMAGED |
668 | DAIHEN FGA-30F 3.2KW 40.68MHz RF GENERATOR COVER DENTED |
669 | DAIHEN FGA-30G RF GENERATOR 2L39-000099-22 |
670 | DAIHEN FGA-30G,2L39-000099-22 RF GENERATOR,ONLY POWER ON TESTED,,NO RETURN |
671 | DAIHEN FGA-30G1 RF GENERATOR 2L39-000099-32 |
672 | Daihen FGA-30G1 RF Generator,AMAT 2L39-000099-32,40.68mHz,3000W,Used,JP^7767 |
673 | Daihen FGA-30G2-V RF Generator |
674 | Daihen FGA-30G2-V RF Generator |
675 | Daihen FGA-30G2-V RF Generator TEL 2L39-000153-V1 |
676 | DAIHEN FGA-30G3 40.68MHz 3000W RF GENERATOR |
677 | Daihen FGA-30GI RF Generator, Tokyo Electron: 2L39-000099-32,Used,Japan&96292 |
678 | Daihen FGA-30G-V RF Generator TEL 2L39-000099-V3 |
679 | DAIHEN FGA-30H RF GENERATOR,40.68 MHz,3200W,AC INPUT:50/60Hz 3x,200V~20A FREE |
680 | DAIHEN FGA-65A,2L39-000171-11 ,40.68MHZ 6500W RF GENERATOR FREESHIP |
681 | DAIHEN HGA-30A,NX-HGA-30A 3KW 100MHz RF GENERATOR |
682 | DAIHEN HGA-30B ,NX-HGA-30B 3KW 100MHz RF GENERATOR |
683 | DAIHEN HGA-30B,NX-HGA-30B 100MHz 3KW RF GENERATOR WORKING |
684 | DAIHEN HGA-30B1* ,NX-HGA-30B1* 3KW 100MHz RF GENERATOR |
685 | Daihen HGA-30C RF Generator TEL Tokyo Electron 2L39-000084-52 New Surplus |
686 | DAIHEN NX-FGA-30C RF GENERATOR 2L39-000047-13 |
687 | DAIHEN NX-HGA-30A RF GENERATOR 2L39-000031-13 |
688 | DAIHEN NX-RGA-50F RF GENERATOR 13.56MHz/5KW |
689 | DAIHEN NX-RGA-50G1 13.56MHz 5000W RF generator , Used |
690 | Daihen NX-RGA-5A-V RF Generator 3Z39-000004-V1 |
691 | DAIHEN RF Generator 10000W 2L39-000221-11 FGA-100A |
692 | DAIHEN RF GENERATOR 24VDC FREQ. 2M.13M HZ 5000W NX-RMN-50N7 |
693 | DAIHEN RF GENERATOR 24VDC FREQ. 2M.13M HZ 5000W NX-RMN-50N7 |
694 | DAIHEN RF GENERATOR FGA-30C , M/N 2L39-000047-13 |
695 | DAIHEN RF GENERATOR MFG-15SA |
696 | DAIHEN RF Generator NGA-50A-V |
697 | DAIHEN RF generator NX-FGA-30C 40.68MHz 3200W , Used |
698 | DAIHEN RF GENERATOR NX-FGA-30C Used |
699 | DAIHEN RF GENERATOR NX-FGA-50G1 Used |
700 | DAIHEN RF GENERATOR NX-HGA-30B1 |
701 | DAIHEN RF Generator RGA-400 A C2 Plasma Amat Applied Material |
702 | DAIHEN RF Generator RGA-400A C2 PLASMA AMAT APPLIED MATERIALS |
703 | DAIHEN RF Generator Used HGA-30C 2L39-000084-52 100MHZ 3kw SEM-I-653=9B48 |
704 | DAIHEN RF GENERATOR, 1000W, 13.56 MHZ, DRFS-10SB26A DRFS-10SB26 |
705 | DAIHEN RF GENERATOR, RGA-10A4 13.56MHz / 1000W, TEL UNITY-II |
706 | Daihen RG-04001C RF Generator Processor Board PCB RG-040 YGA-36B |
707 | Daihen RG-04701 RF Generator Interface Board PCB RG-047 YGA-36B |
708 | Daihen RG-048A05B RF Generator Processor Board PCB RG-048A YGA-36B Working |
709 | DAIHEN RG-114A BOARD FOR DAIHEN WGA-3012 RF GENERATOR |
710 | Daihen RG-1258A05 RF Generator PCB |
711 | Daihen RG-127301 RF Generator Capacitor Board PCB RG-1273 YGA-36B Working |
712 | Daihen RG-220601 RF Generator Capacitor Board PCB RG-2206 YGA-36B Working |
713 | Daihen RG-250801 RF Generator Interface Board PCB RG-2508 YGA-36B Working |
714 | Daihen RG-250901 RF Generator Interface Board PCB RG-2509 YGA-36B Working |
715 | Daihen RG-267A04A RF Generator Power Supply Board PCB RG-267A YGA-36B Working |
716 | Daihen RG-294406 RF Generator Capacitor Board PCB RG-2944 YGA-36B Working |
717 | DAIHEN RG-312 BOARD FOR DAIHEN WGA-3012 RF GENERATOR |
718 | Daihen RG-346201 RF Generator PCB RG-3465B RG-3464A RG-3463 Lot of 6 Working |
719 | Daihen RG-392701 RF Generator Interface Board PCB YGA-36B |
720 | DAIHEN RG-417A BOARD FOR DAIHEN WGA-3012 RF GENERATOR |
721 | DAIHEN RG-424-07A BOARD FOR DAIHEN WGA-3012 RF GENERATOR |
722 | Daihen RGA-10D-V 3D80-000826-V3 RF Generator 13.56MHz 1000W 50/60Hz 30A |
723 | Daihen RGA-10D-V RF Generator TEL 3D80-000826-V3 Copper Cu Exposed Working Spare |
724 | Daihen RGA-10D-V RF Generator TEL 3D80-000826-V3 Copper Cu Not Working |
725 | Daihen RGA-10D-V RF Generator TEL 3D80-000826-V5 Interlock Not Working |
726 | Daihen RGA-10D-V RF Generator TEL Tokyo Electron 3D80-000826-V2 Copper Cu |
727 | Daihen RGA-10D-V RF Generator TEL Tokyo Electron 3D80-000826-V3 |
728 | DAIHEN RGA-10G,NX-RGA-10G RF GENERATOR 1KW 13.56MHz EXCELLENT WORKING |
729 | DAIHEN RGA-20C,RGA-20C-V RF GENERATOR 2KW 13.56MHz |
730 | Daihen RGA-50C-V RF Generator TEL 3D39-050099-V4, 13.56MHz/5kW |
731 | Daihen RGA-50E-V RF Generator TEL Tokyo Electron 3D39-000003-V1 |
732 | Daihen RGA-50E-V RF Generator TEL Tokyo Electron 3D39-000003-V1 Untested Surplus |
733 | DAIHEN RGA-50G,NX-RGA-50G RF GENERATOR 5KW 13.56MHz EXCELLENT WORKING |
734 | DAIHEN RGA-50K 13.56MHz 5000W RF GENERATOR |
735 | DAIHEN RMN-50N6 RF GENERATOR APPLIED MATERIALS 0190-25187 AMAT 5000W 2-13MHz |
736 | DAIHEN RTGA-30A1 RF GENERATOR 2L39-000009-21 |
737 | Daihen RTGA-30C-V RF Generator TEL 2L39-000098-V3 |
738 | Daihen RTGA-30C-V RF Generator TEL 2L39-000098-V3 |
739 | DAIHEN Used HGA-30C 100MHz 3kW 2L39-000084-52 RF Generator SEM-I-655=9B48 |
740 | DAIHEN Used HGA-30C 100MHZ 3kw RF Generator SEM-I-649=9B48 |
741 | DAIHEN Used HGA-30C 2L39-000084-52 100MHZ 3kw RF Generator SEM-I-650=9B48 |
742 | DAIHEN Used RF Generator HGA-30C SEM-I-645=9F48 |
743 | Daihen WGA-50E-V RF Generator Stack TEL 3D80-001480-V1 |
744 | DAIHEN WGA-50E-V RF GENERATOR Stack TEL 3D80-001480-V4 SOLD |
745 | Daihen XGA-18C RF Generator 1800 W @ 1.6 MHz 1.8 kW |
746 | Daihen YGA-36B RF Generator AMAT Applied Materials 0190-54072 |
747 | DAIHEN, MFG-20SA3, RF Generator Controller |